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Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
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Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
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| Andrés, Miguel V. Perfil; Tudor, M.J.; Foulds, K.W.H. | |
| This document is a artículoDate1988 | |
| The vibrational mode spectrum of a silicon vibrating pressure sensor is investigated. | |
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Andrés, Miguel V. Tudor, M.J. Foulds, K.W.H. 1988 Sensitivity and mode spectrum of a frequency-output silicon pressure sensor Sensors and Actuators 15 417 426 |
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| https://doi.org/10.1016/0250-6874(88)81510-5 |